Quality factor estimates of resonant beams with nonlinear vibrations
YAN Bin, LIU Yunfeng, DONG Jingxin
State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China
Abstract：Vacuum resonant accelerometers have nonlinear sweeping frequency response, so the regular method cannot be used to measure the quality factor. A nonlinear model of the resonant beam is used here to monitor the effect of the vacuum package. The system calculates the quality factor through fitting the sweeping frequency data for the nonlinear vibrations. Tests on a resonant accelerometer verify the consistency and accuracy of the method. The measured quality factors of the accelerometers are all above 2×105. In addition, this method is also used to measure the relationship between the pressure and the quality factor, which indicates that the pressure inside the vacuum package is about 0.1 Pa. The temperature tests and long-term monitoring tests show the reliability of the vacuum packaging.
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2016, Vol. 56 
