AlN/α-SiC based surface acoustic wave resonator and its strain response
CHEN Shuo, YOU Zheng
State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China
Abstract：The need to monitor the health of gas turbines, geothermal wells and other equipment in harsh environments requires micro and nano sensors for harsh environments. This paper introduces an AlN/α-SiC based surface acoustic wave resonator. The strain coefficient factor (SCF) of the resonator is analyzed and calculated theoretically based on the strain field and a proposed strain-velocity relationship. The resonator is micro-fabricated and characterized to determine the SCF of the fabricated resonator. An AlN/α-SiC resonator with a 1.5 μm thick AlN layer, has an SCF of 0.515×10-6/με at 298 K, which matches well with the calculated results.
陈硕, 尤政. 基于AlN/α-SiC的声表面波谐振器应变响应特性[J]. 清华大学学报（自然科学版）, 2016, 56(10): 1061-1065.
CHEN Shuo, YOU Zheng. AlN/α-SiC based surface acoustic wave resonator and its strain response. Journal of Tsinghua University(Science and Technology), 2016, 56(10): 1061-1065.
[1] Penza M, Aversa P, Cassano G, et al. Layered SAW gas sensor with single-walled carbon nanotube-based nanocomposite coating [J]. Sensors & Actuators B: Chemical, 2007, 127(1): 168-178.
[2] Benetti M, Cannata D, Di Pietrantonio F, et al. Pressure sensor based on surface acoustic wave resonators [C]//Sensors, 2008 IEEE. Lecce, Italy, 2008: 1024-1027.
[3] Yatsuda H, Kogai T. 3F-3 liquid sensor using SAW and SH-SAW on quartz [J]. Proceedings of the IEEE Ultrasonics Symposium, 2006, 1: 552-555.
[4] Hornsteiner J, Born E, Fischerauer G, et al. Surface acoustic wave sensors for high-temperature applications [C]//Proceedings of the 1998 IEEE International Frequency Control Symposium. Pasadena, CA, USA, 1998: 615-620.
[5] Blampain E, Elmazria O, Legrani O, et al. Platinum/AlN/sapphire SAW resonator operating in GHz range for high temperature wireless SAW sensor [C]//2013 IEEE International Ultrasonics Symposium (IUS). Prague, Czech, 2013: 1081-1084.
[6] Lin C M, Chen Y Y, Felmetsger V V, et al. Surface acoustic wave propagation properties in AlN/3C-SiC/Si composite structure [C]//2010 IEEE Ultrasonics Symposium (IUS). San Diego, CA, USA, 2010: 1696-1699.
[7] Littles J W, Jacobs L J, Zureick A H. The Ultrasonic Measurement of Elastic Constants of Structural FRP Composites [M]. New York, USA: Springer, 1997.
[8] Rao R R, Padmaja A. Effective second-order elastic constants of a strained crystal using the finite strain elasticity theory [J]. Journal of Applied Physics, 1987, 62(2): 440-443.
[9] Hashimoto K, Hashimoto K Y. Surface Acoustic Wave Devices in Telecommunications [M]. Berlin, Germany: Springer, 2000.
[10] Akiyama T, Briand D, De Rooij N F. Design-dependent gauge factors of highly doped n-type 4H-SiC piezoresistors [J]. Journal of Micromechanics and Microengineering, 2012, 22(8), 085034.
[11] Li C, Liu X, Shu L, et al. AlN-based surface acoustic wave resonators for temperature sensing applications [J]. Materials Express, 2015, 5(4): 367-370.
[12] Li Z, Bradt R C. Thermal expansion of the hexagonal (4H) polytype of SiC [J]. Journal of Applied Physics, 1986, 60(2): 612-614.
[13] Wang K, Reeber R R. Thermal expansion of GaN and AIN [C]//MRS Proceedings. Cambridge, UK: Cambridge University Press, 1997, 482: 863.
[14] Jones S, Menon C S. Non-linear elastic behavior of hexagonal silicon carbide [J]. Physica Status Solidi: B, 2014, 251(6): 1186-1191.
[15] Pandey D K, Yadav R R. Temperature dependent ultrasonic properties of aluminium nitride [J]. Applied Acoustics, 2009, 70(3): 412-415.
2016, Vol. 56 
