Abstract：Resonator vibration control based on parametric drive is a time-varying control method which has important applications in micro-electro-mechanical system (MEMS) sensors. This paper presents the design of a closed-loop parametric drive resonator vibration control system. The mathematical models of the parametric drive resonator and the control loops are derived theoretically. The system stability is analyzed with criteria for selecting the control loop parameters. Numerical simulations verify the theoretical analysis and the influences of the control loop parameters on the system performance. The analysis is then used to design a parametric drive vibration control for a MEMS resonator. The settling time of the starting process is less than 0.2 s and the variance of the amplitude at steady state is 0.04 mV. The research provides an important reference for the design of closed-loop parametric drive resonator vibration control systems.
宋明亮, 周斌, 张嵘. 基于参量激励的谐振子振动控制系统的设计[J]. 清华大学学报（自然科学版）, 2018, 58(1): 87-93.
SONG Mingliang, ZHOU Bin, ZHANG Rong. Design of a resonator vibration control system based on parametric drive. Journal of Tsinghua University(Science and Technology), 2018, 58(1): 87-93.
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