1. State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China; 2. Beijing Innovation Center for Future Chip, Tsinghua University, Beijing 100084, China
Abstract：Micro sensing systems will be widely used in the future because they are small, multifunctional and self-powered. However, current designs do not balance their performance with key constraints which limits their further development. This paper presents a general design method for micro sensing systems based on multidisciplinary design optimization. The method facilitates optimization of micro sensing systems by analyzing the parameters in various subspaces to optimize the design. Vehicle detection micro-systems are used as an example with various optimization design targets for the prototypes. The test results coincide well with the design predictions and meet the design requirements. The method accuracy shows that it balances performance requirements with systems constraints during the design process to optimize the system.
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