高效率的MEMS陀螺管芯动态特性测试方法

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摘要

陀螺管芯是微机电(MEMS)陀螺的核心器件,利用多频激励方法可以提高陀螺管芯的动态特性测试效率。该文基于静电激励-电容检测的原理进行线振动MEMS陀螺的动态特性测试,构造了线性初始相位差分布的等幅多频激励信号解决合成信号最大值限制的问题。用多频激励方法,完成频率分辨率为1 Hz、谐振频率3 000 Hz附近601个频率点的单个模态测试只需1.5 s。多频激励和正弦扫频激励对比测试表明: 两种方法测得幅、相频特性曲线几乎完全相同; 谐振频率、幅值和相位的测试重复性相近; 但多频方法测试精度略低于扫频激励。多频方法完全可满足大批量管芯装配前的筛选和配对测试的迫切需求。

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关键词 ：试验、测试技术与方法, 动态特性测试, 微机电(MEMS)陀螺管芯, 多频激励

Abstract：

The gyroscope chip is the key component of micro electro mechanical system (MEMS) gyroscopes. The multi-frequency signal excitation method is used to improve the efficiency of dynamic characteristic tests of such chips. The dynamic characteristics of the linear vibration MEMS gyroscope are analyzed using electrostatic excitation and capacitive detection. A multi-frequency signal with an equivalent amplitude and a linear initial phase difference distribution is constructed to fit the maximum amplitude limit of the exciting signal. This method takes only 1.5 s to finish one modal test with 601 frequency points and 1 Hz frequency resolution around the 3 000 Hz resonance frequency. The multi-frequency method acquires almost the same amplitude-frequency and phase-frequency curves as the traditional sine wave sweep excitation method and their repeatabilities for the resonance frequency and corresponding amplitude and phase are similar. Although the testing accuracy of the multi-frequency method is a little lower than that of the sine wave sweep method, the multi-frequency method can be used to test large numbers of gyroscope chips for filtering and pairing.

Key words： experiment/test technology and method dynamic characteristics test micro electro mechanical system (MEMS) gyroscope chip multi-frequency signal excitation

收稿日期: 2013-10-08 出版日期: 2014-06-15

引用本文:

邓焱,邢超,张嵘,周斌. 高效率的MEMS陀螺管芯动态特性测试方法[J]. 清华大学学报（自然科学版）, 2014, 54(6): 811-814.
Yan DENG,Chao XING,Rong ZHANG,Bin ZHOU. Rapid testing of the dynamic characteristics of MEMS gyroscope chips. Journal of Tsinghua University(Science and Technology), 2014, 54(6): 811-814.

链接本文:

http://jst.tsinghuajournals.com/CN/ 或 http://jst.tsinghuajournals.com/CN/Y2014/V54/I6/811

线振动MEMS陀螺的结构示意图

合成信号最大峰值与频率点总数的关系曲线

幅、相频特性曲线测试结果

检测轴驱动检测轴检测测试结果

驱动轴驱动驱动轴检测测试结果

驱动轴驱动驱动轴检测相同幅值测试结果

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