1. State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China; 2. Beijing Innovation Center for Future Chip, Tsinghua University, Beijing 100084, China
Abstract：Micro sensing systems will be widely used in the future because they are small, multifunctional and self-powered. However, current designs do not balance their performance with key constraints which limits their further development. This paper presents a general design method for micro sensing systems based on multidisciplinary design optimization. The method facilitates optimization of micro sensing systems by analyzing the parameters in various subspaces to optimize the design. Vehicle detection micro-systems are used as an example with various optimization design targets for the prototypes. The test results coincide well with the design predictions and meet the design requirements. The method accuracy shows that it balances performance requirements with systems constraints during the design process to optimize the system.
[1] Lee Y, Bang S, Lee I, et al. A modular 1 mm die-stacked sensing platform with low power I2C inter-die communication and multi-modal energy harvesting[J]. IEEE Journal of Solid-State Circuits, 2013, 48(1):229-243. [2] Kim G, Lee Y, Foo Z, et al. A millimeter-scale wireless imaging system with continuous motion detection and energy harvesting[C]//2014 Symposium on VLSI Circuits Digest of Technical Papers. Honolulu, HI, USA:IEEE, 2014:1-2. [3] Farshchi S, Nuyujukian P H, Pesterev A, et al. A TinyOS-based wireless neural sensing, archiving, and hosting system[C]//The 2nd International IEEE EMBS Conference on Neural Engineering, 2005. Arlington, VA, USA:IEEE, 2005:671-674. [4] Polastre J, Szewczyk R, Culler D. Telos:Enabling ultra-low power wireless research[C]//Fourth International Symposium on Information Processing in Sensor Networks, 2005. Boise, ID, USA:IEEE, 2005:364-369. [5] Jeong S, Foo Z, Lee Y, et al. A fully-integrated 71 nW CMOS temperature sensor for low power wireless sensor nodes[J]. IEEE Journal of Solid-State Circuits, 2014, 49(8):1682-1693 [6] Oh S, Lee Y, Wang J, et al. A dual-slope capacitance-to-digital converter integrated in an implantable pressure-sensing system[J]. IEEE Journal of Solid-State Circuits, 50(7):1581-1591. [7] Sobieszczanski-Sobieski J, Chopra I. Multidisciplinary optimization of aeronautical systems[J]. Journal of Aircraft, 1990, 27(12):977-978. [8] Braun R, Gage P, Kroo I, et al. Implementation and performance issues in collaborative optimization[C]//The 6th Symposium on Multidisciplinary Analysis and Optimization. Bellevue, WA, USA:AIAA, 1996:4017. [9] Alexandrov N M, Lewis R M. Comparative properties of collaborative optimization and other approaches to MDO[J/OL].[1999-07-01]. https://ntrs.nasa.gov/archive/nasa/casi.ntrs.nasa.gov/19990064129.pdf [10] Lau J H, Yue T G. Effects of TSVs (through-silicon vias) on thermal performances of 3D IC integration system-in-package (SiP)[J]. Microelectronics Reliability, 2012, 52(11):2660-2669. [11] Seybold J S. Introduction to RF propagation[M]. Hoboken John Wiley & Sons, 2005. [12] Jones A D, Underwood C P. A thermal model for photovoltaic systems[J]. Solar Energy, 2001, 70(4):349-359. [13] Gualous H, Louahlia H, Gallay R. Supercapacitor characterization and thermal modelling with reversible and irreversible heat effect[J]. IEEE Transactions on power electronics, 2011, 26(11):3402-3409. [14] Versfeld N J, Vos J. Annoyance caused by sounds of wheeled and tracked vehicles[J]. The Journal of the Acoustical Society of America, 1997, 101(5):2677-2685.
2019, Vol. 59 
