Abstract：Cable disturbances are a major disturbance source for high precision motion control of wafer scanners. The disturbances couple extra forces and couples to the system, which degrades the motion control system performance. This study analyzes the mechanics of a wafer scanner system and establishes a mathematical system model. Two time-varying parameters can be obtained for a generalized center of mass by an online recursive estimation algorithm to decouple the wafer scanner's four coils. Tests show that the online real-time dynamic decoupling strategy for a plane motor improves the self-adaptive ability, reduces the crosstalk between the three degrees of freedom (DOF), and improves the wafer scanner control.
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2016, Vol. 56 
