Design of a resonator vibration control system based on parametric drive

doi:10.16511/j.cnki.qhdxxb.2018.22.012

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Abstract Resonator vibration control based on parametric drive is a time-varying control method which has important applications in micro-electro-mechanical system (MEMS) sensors. This paper presents the design of a closed-loop parametric drive resonator vibration control system. The mathematical models of the parametric drive resonator and the control loops are derived theoretically. The system stability is analyzed with criteria for selecting the control loop parameters. Numerical simulations verify the theoretical analysis and the influences of the control loop parameters on the system performance. The analysis is then used to design a parametric drive vibration control for a MEMS resonator. The settling time of the starting process is less than 0.2 s and the variance of the amplitude at steady state is 0.04 mV. The research provides an important reference for the design of closed-loop parametric drive resonator vibration control systems.

Keywords micro-electro-mechanical system (MEMS) resonator vibration control parametric drive stability analysis

ZTFLH:

V241.5

Issue Date: 15 January 2018

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	SONG Mingliang
	ZHOU Bin
	ZHANG Rong

Cite this article:

SONG Mingliang,ZHOU Bin,ZHANG Rong. Design of a resonator vibration control system based on parametric drive[J]. Journal of Tsinghua University(Science and Technology), 2018, 58(1): 87-93.

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http://jst.tsinghuajournals.com/EN/10.16511/j.cnki.qhdxxb.2018.22.012 OR http://jst.tsinghuajournals.com/EN/Y2018/V58/I1/87

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