Rapid testing of the dynamic characteristics of MEMS gyroscope chips

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Abstract

The gyroscope chip is the key component of micro electro mechanical system (MEMS) gyroscopes. The multi-frequency signal excitation method is used to improve the efficiency of dynamic characteristic tests of such chips. The dynamic characteristics of the linear vibration MEMS gyroscope are analyzed using electrostatic excitation and capacitive detection. A multi-frequency signal with an equivalent amplitude and a linear initial phase difference distribution is constructed to fit the maximum amplitude limit of the exciting signal. This method takes only 1.5 s to finish one modal test with 601 frequency points and 1 Hz frequency resolution around the 3 000 Hz resonance frequency. The multi-frequency method acquires almost the same amplitude-frequency and phase-frequency curves as the traditional sine wave sweep excitation method and their repeatabilities for the resonance frequency and corresponding amplitude and phase are similar. Although the testing accuracy of the multi-frequency method is a little lower than that of the sine wave sweep method, the multi-frequency method can be used to test large numbers of gyroscope chips for filtering and pairing.

Keywords experiment/test technology and method dynamic characteristics test micro electro mechanical system (MEMS) gyroscope chip multi-frequency signal excitation

Issue Date: 15 June 2014

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	Articles by authors

	Yan DENG
	Chao XING
	Rong ZHANG
	Bin ZHOU

Cite this article:

Yan DENG,Chao XING,Rong ZHANG, et al. Rapid testing of the dynamic characteristics of MEMS gyroscope chips[J]. Journal of Tsinghua University(Science and Technology), 2014, 54(6): 811-814.

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http://jst.tsinghuajournals.com/EN/ OR http://jst.tsinghuajournals.com/EN/Y2014/V54/I6/811

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