面向高温环境应用的微纳传感器在燃气轮机健康监控、地热井环境监控等领域具有广泛的应用前景。该文主要介绍了一种基于AlN薄膜和α-SiC衬底的声表面波谐振器，讨论了谐振器的应变敏感性来源，提出了一种基于应变场-波速关系计算谐振器应变敏感系数的方法。采用微纳米加工工艺加工了谐振器，并进行了材料表征。测量了谐振器的应变敏系数：具有1.5 μm厚AlN压电薄膜的AlN/α-SiC基声表面波谐振器在298 K下应变敏感系数为0.515×10-6/με，与计算结果具有较好一致性。
Abstract
The need to monitor the health of gas turbines, geothermal wells and other equipment in harsh environments requires micro and nano sensors for harsh environments. This paper introduces an AlN/α-SiC based surface acoustic wave resonator. The strain coefficient factor (SCF) of the resonator is analyzed and calculated theoretically based on the strain field and a proposed strain-velocity relationship. The resonator is micro-fabricated and characterized to determine the SCF of the fabricated resonator. An AlN/α-SiC resonator with a 1.5 μm thick AlN layer, has an SCF of 0.515×10-6/με at 298 K, which matches well with the calculated results.
关键词
声表面波谐振器 /
氮化铝 /
碳化硅 /
应变响应
Key words
surface acoustic wave resonator /
aluminum nitride /
silicon carbide /
strain response
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