光刻机工件台是光刻机的关键子系统，其中的线管组件是其传输信号、动力及冷却液等必不可少的组成部分。线管组件产生的扰动力会恶化工件台系统的超精密运动性能，因此抑制线管组件扰动力对提高工件台系统的运动性能具有重要意义。该文以工件台系统的子系统掩模台系统的线管组件为例，以减小线管组件扰动力波动、提高掩模台运动性能为目的，建立了线管组件有限元模型，对线管组件的主要结构参数进行了优化，提出了线管组件优化的一些准则，并进行了实验验证。实验表明：该有限元模型与实验相比的一阶频率误差在10%以内，验证了模型的准确性。仿真实验结果表明：优化后的线管组件L向扰动力波动幅值减小80%。
Abstract
The stage is the key subsystem in a lithography machine. The cable-pipe assembly transmits the motor coil signal, power and coolant in stage systems. However, disturbances generated by the cable-pipe assembly reduce the ultra-precision of the stage. Therefore, the disturbances need to be reduced to improve the stage positioning accuracy. The cable-pipe assembly and its disturbance characteristics are analyzed to develop a simplified finite element model of the cable-pipe system. Then, the main structural parameters of the assembly are optimized with design guidelines for future cable-pipe assembly designs. Tests show that the finite element model is accurate with a first order frequency error of less than 10%. Simulations show that the disturbance amplitude of the L-direction is reduced by 80% relative to that without optimization.
关键词
工件台 /
线管组件 /
扰动力 /
结构优化
Key words
stage system /
cable-pipe assembly /
disturbance /
structural optimization
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参考文献
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