Calculation of the intrinsic axial direction of a ring MEMS gyroscope

WANG Jin; CHEN Zhiyong; ZHANG Rong

doi:10.16511/j.cnki.qhdxxb.2019.21.027

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Journal of Tsinghua University(Science and Technology) ›› 2020, Vol. 60 ›› Issue (1) : 76-81. DOI: 10.16511/j.cnki.qhdxxb.2019.21.027

MACHANICAL ENGINEERING

Calculation of the intrinsic axial direction of a ring MEMS gyroscope

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Abstract

Structural imperfections in ring micro-electromechanical system (MEMS) gyroscopes lead to frequency splitting of the operating mode and axial deflection of the vibrations, which are some of the main factors affecting the performance. The mass distribution imperfections most strongly influence the fourth harmonic component. The angular position of this defect is determined from the frequency response characteristics at the detection electrodes of the ring structure which were analyzed theoretically in this study for various defect angles. A method is also given to calculate the intrinsic axial direction of the ring structure operating mode from the frequency response parameters. The accuracy of this method was verified against finite element calculations of the harmonic response of the ring structure with structural defects with the results showing that the intrinsic axial relative error is about 2%.

Key words

ring gyroscope / intrinsic axis / structure defect / micro-electromechanical system

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WANG Jin, CHEN Zhiyong, ZHANG Rong. Calculation of the intrinsic axial direction of a ring MEMS gyroscope[J]. Journal of Tsinghua University(Science and Technology). 2020, 60(1): 76-81 https://doi.org/10.16511/j.cnki.qhdxxb.2019.21.027

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