Ring-diode capacitance detection circuit characteristics

ZHOU Xiaotong; ZHANG Rong

doi:10.16511/j.cnki.qhdxxb.2020.21.012

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Journal of Tsinghua University(Science and Technology) ›› 2021, Vol. 61 ›› Issue (6) : 653-658. DOI: 10.16511/j.cnki.qhdxxb.2020.21.012

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Ring-diode capacitance detection circuit characteristics

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Abstract

The accuracy of micro-capacitance detection systems in gyroscopes directly determines the rotor displacement measurement accuracy, which in turn determines the overall accuracy of the gyroscope. A micro-capacitance detector was developed in this study based on ring-diode demodulation for the special structure of a spinning-rotor gyro. The system output gain variations were studied to develop a gain algorithm based on the leakage minimization principle with a noise reduction algorithm to reduce the output noise. This micro-capacitance detection method based on ring diodes reduces the noise which improves the capacitance detection resolution. Tests show that the optimized circuit gives a capacitance resolution of better than 20.0 aF and a resolution at the unit bandwidth of better than 0.258 aF·Hz^-1/2 which is excellent capacitance measurement accuracy.

Key words

micro-capacitance detection / ring diodes / leakage minimization principle / capacitance detection resolution

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ZHOU Xiaotong, ZHANG Rong. Ring-diode capacitance detection circuit characteristics[J]. Journal of Tsinghua University(Science and Technology). 2021, 61(6): 653-658 https://doi.org/10.16511/j.cnki.qhdxxb.2020.21.012

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