硅晶圆上窄节距互连铜凸点
刘子玉1, 蔡坚1,2, 王谦1, 程熙云1, 石璐璐1

Copper bumping for fine pitch interconnections
Ziyu LIU1, Jian CAI1,2, Qian WANG1, Xiyun CHENG1, Lulu SHI1