硅晶圆上窄节距互连铜凸点
刘子玉
1
, 蔡坚
1,
2
, 王谦
1
, 程熙云
1
, 石璐璐
1
Copper bumping for fine pitch interconnections
Ziyu LIU
1
, Jian CAI
1,
2
, Qian WANG
1
, Xiyun CHENG
1
, Lulu SHI
1