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清华大学学报(自然科学版)  2015, Vol. 55 Issue (7): 722-727    
  机械工程 本期目录 | 过刊浏览 | 高级检索 |
扫描干涉光刻机相位锁定系统设计
王磊杰, 张鸣, 朱煜, 鲁森, 杨开明
清华大学 机械工程系, 摩擦学国家重点实验室, 北京 100084
Design of phase locking system for an interference lithography scanner
WANG Leijie, ZHANG Ming, ZHU Yu, LU Sen, YANG Kaiming
State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China
全文: PDF(1380 KB)  
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摘要 针对扫描干涉光刻机干涉图形相位锁定需求, 提出并设计了干涉图形相位锁定系统。该系统采用零差相位干涉仪实现干涉图形相位漂移的高速高精测量, 采用声光调制器以高速高精移频的方式进行干涉图形相位调制, 并通过闭环反馈控制实现相位锁定。实验结果显示: 系统闭环控制可实现±1/25个干涉图形周期的锁定精度, 系统具有良好的相位锁定性能。该系统具有光路短、易于装调、激光利用率高等优点, 未来用于扫描干涉光刻机更具优势。
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王磊杰
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鲁森
杨开明
关键词 扫描干涉光刻机相位锁定零差相位干涉仪声光调制器    
Abstract:An interference image phase locking system is built for an interference lithography scanner. This system has a feedback control system and uses the homodyne interference method for fast, accurate phase drift measurement and an acousto-optic modulator to accurately shift the phase of the interference image. Tests show that the system has ±1/25 interference image period accuracy when the system uses closed-loop control, which illustrates that this phase locking system has good locking performance. In addition, the system has a short optical path, is easy to assemble and adjust, and has a high laser utilization ratio, so the system is suitable for high-speed interference lithography scanners.
Key wordsinterference lithography scanner    phase locking    homodyne phase interferometer    acousto-optic modulator
收稿日期: 2015-01-07      出版日期: 2015-09-18
ZTFLH:  TH6  
  TH74  
通讯作者: 张鸣,副研究员,E-mail:zm01@mails.tsinghua.edu.cn     E-mail: zm01@mails.tsinghua.edu.cn
引用本文:   
王磊杰, 张鸣, 朱煜, 鲁森, 杨开明. 扫描干涉光刻机相位锁定系统设计[J]. 清华大学学报(自然科学版), 2015, 55(7): 722-727.
WANG Leijie, ZHANG Ming, ZHU Yu, LU Sen, YANG Kaiming. Design of phase locking system for an interference lithography scanner. Journal of Tsinghua University(Science and Technology), 2015, 55(7): 722-727.
链接本文:  
http://jst.tsinghuajournals.com/CN/  或          http://jst.tsinghuajournals.com/CN/Y2015/V55/I7/722
  图1 扫描干涉光刻机干涉曝光及相位锁定系统原理
  图2 相位锁定系统实验装置
  图3 开环和闭环情况的干涉仪电压值
  图4 开环情况下干涉仪电压幅值谱密度函数
  图5 闭环情况下干涉仪电压幅值谱密度函数
  图6 闭环情况下干涉仪电压累积幅值谱函数
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