针对扫描干涉光刻机干涉图形相位锁定需求, 提出并设计了干涉图形相位锁定系统。该系统采用零差相位干涉仪实现干涉图形相位漂移的高速高精测量, 采用声光调制器以高速高精移频的方式进行干涉图形相位调制, 并通过闭环反馈控制实现相位锁定。实验结果显示: 系统闭环控制可实现±1/25个干涉图形周期的锁定精度, 系统具有良好的相位锁定性能。该系统具有光路短、易于装调、激光利用率高等优点, 未来用于扫描干涉光刻机更具优势。
Abstract
An interference image phase locking system is built for an interference lithography scanner. This system has a feedback control system and uses the homodyne interference method for fast, accurate phase drift measurement and an acousto-optic modulator to accurately shift the phase of the interference image. Tests show that the system has ±1/25 interference image period accuracy when the system uses closed-loop control, which illustrates that this phase locking system has good locking performance. In addition, the system has a short optical path, is easy to assemble and adjust, and has a high laser utilization ratio, so the system is suitable for high-speed interference lithography scanners.
关键词
扫描干涉光刻机 /
相位锁定 /
零差相位干涉仪 /
声光调制器
Key words
interference lithography scanner /
phase locking /
homodyne phase interferometer /
acousto-optic modulator
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