PDF(2705 KB)
PDF(2705 KB)
PDF(2705 KB)
CMP多区压力定量解耦协同控制
Quantitative decoupling cooperative control of CMP multi-zone pressure systems
化学机械抛光(CMP) / 多输入多输出(MIMO) / 定量解耦 / 相对增益矩阵
chemical mechanical polishing (CMP) / multiple-input multiple-output (MIMO) / quantitative decoupling / relative gain array (RGA)
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