在光刻机硅片台高精度运动控制系统中, 线缆对硅片台运动产生的扰动是一个主要的扰动源。这是由于线缆部件附加在硅片台上的扰动力和力偶导致了系统的耦合问题, 恶化了系统运动控制的性能。该文通过对硅片台粗动台的力学建模, 分析附加力偶的影响, 引入广义质心偏移的数学描述, 通过时变参数在线递推估计算法获得广义质心偏移的参数, 该参数实时用于硅片台平面电机4组线圈水平推力的解耦。实验结果表明: 使用该参数递推估计算法实现实时动态解耦, 自适应能力强, 降低了系统3自由度之间的串扰, 提高了运动控制系统的性能。
Abstract
Cable disturbances are a major disturbance source for high precision motion control of wafer scanners. The disturbances couple extra forces and couples to the system, which degrades the motion control system performance. This study analyzes the mechanics of a wafer scanner system and establishes a mathematical system model. Two time-varying parameters can be obtained for a generalized center of mass by an online recursive estimation algorithm to decouple the wafer scanner's four coils. Tests show that the online real-time dynamic decoupling strategy for a plane motor improves the self-adaptive ability, reduces the crosstalk between the three degrees of freedom (DOF), and improves the wafer scanner control.
关键词
线缆扰动 /
解耦 /
在线递推估计算法 /
气浮平面电机 /
广义质心
Key words
cable disturbance /
decoupling /
online recursive estimation algorithm /
planar motor /
generalized center of mass
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基金
国家自然科学基金项目(51475261, 51475262); 清华大学自主科研项目(20151080363)
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