集成电路钴互连异质结构晶圆化学机械抛光
张力飞, 王同庆, 赵德文, 路新春
Chemical mechanical polishing of cobalt interconnect wafers with heterogeneous structures in integrated circuits
Lifei ZHANG, Tongqing WANG, Dewen ZHAO, Xinchun LU
清华大学学报（自然科学版）
.
2025, (2): 269
-279
.
DOI: 10.16511/j.cnki.qhdxxb.2024.21.037
