回转对称微结构光学模具的超精密切削B轴旋转加工工艺

高兴; 李勇; 钟昊; 岳全; 李朝将

doi:10.16511/j.cnki.qhdxxb.2017.22.002

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清华大学学报（自然科学版） ›› 2017, Vol. 57 ›› Issue (2) : 120-127. DOI: 10.16511/j.cnki.qhdxxb.2017.22.002

机械工程

回转对称微结构光学模具的超精密切削B轴旋转加工工艺

高兴, 李勇, 钟昊, 岳全, 李朝将

作者信息 +

B axis rotating machining of microstructured optical molds with rotational symmetry based on ultra-precision cutting

GAO Xing, LI Yong, ZHONG Hao, YUE Quan, LI Chaojiang

Author information +

文章历史 +

摘要

为避免回转对称微结构光学模具加工中产生的毛刺、尖角缺损及表面划痕，提出一种基于超精密切削的B轴旋转加工工艺。通过实验研究加工路径、切削速度、B轴旋转速度及切深等影响微模具面形精度和表面质量的主要因素，优化切削轨迹规划与加工参数，开展了2种微结构模具的加工实验，得到尺寸精度小于1.4 μm、表面粗糙度小于14 nm的结构完整性较好、表面无划痕的模具。实验结果验证了回转对称微结构光学模具B轴旋转加工工艺的可行性。

Abstract

A B axis rotating machining process based on ultra-precision cutting was developed to prevent burrs, sharp corner defects and surface scratches when machining microstructured optical molds with rotational symmetry. The form accuracy and surface quality of the molds were mainly influenced by the machining path, cutting speed, B axis rotating speed and cutting depth. Tests of these factors were used to optimize the cutting trajectory planning and machining parameters. Two microstructured molds were constructed with no sharp corner defects and no surface scratches, dimensional accuracies of 1.4 μm and surface roughnesses better than 14 nm. The results show the feasibility of the B axis rotating machining process for cutting microstructured optical molds with rotational symmetry.

导出引用

高兴, 李勇, 钟昊, 岳全, 李朝将. 回转对称微结构光学模具的超精密切削B轴旋转加工工艺[J]. 清华大学学报（自然科学版）. 2017, 57(2): 120-127 https://doi.org/10.16511/j.cnki.qhdxxb.2017.22.002

GAO Xing, LI Yong, ZHONG Hao, YUE Quan, LI Chaojiang. B axis rotating machining of microstructured optical molds with rotational symmetry based on ultra-precision cutting[J]. Journal of Tsinghua University(Science and Technology). 2017, 57(2): 120-127 https://doi.org/10.16511/j.cnki.qhdxxb.2017.22.002

中图分类号： TG519.3

参考文献

[1] Brinksmeier E, Riemer O, Stem R. Machining of precision parts and microstructures[C]//Proceedings of the 1st International Conference and General Meeting of the European Society for Precision Engineering and Nanotechnology. Yokohama, 1999:3-11. [2] Xie W T, Dai Y J, Wang R Z, et al. Concentrated solar energy applications using Fresnel lenses:A review[J]. Renewable and Sustainable Energy Reviews, 2011, 15:2588-2606. [3] 赵清亮, 郭兵. 微结构光学功能元件模具的超精密磨削加工技术[J]. 机械工程学报, 2011, 47(21):177-185.ZHAO Qingliang, GUO Bing. Ultraprecision grinding technology of microstructured optical functional molds[J]. Journal of Mechanical Engineering, 2011, 47(21):177-185. (in Chinese) [4] Brenner K H, Kufner M, Kufner S, et al. Application of three-dimensional micro-optical components formed by lithography, electroforming, and plastic molding[J]. Applied Optics, 1993, 32(32):6464-6469. [5] 王贵林, 朱登超, 戴一帆. 复杂光学表面的快刀伺服加工特性与路径规划[J]. 机械工程学报, 2011, 47(15):175-180.WANG Guilin, ZHU Dengchao, DAI Yifan. Machining characteristics and route planning of complex optical surface by using fast tool servo[J]. Journal of Mechanical Engineering, 2011, 47(15):175-180. (in Chinese) [6] 李荣彬, 孔令豹, 张志辉, 等. 微结构自由曲面的超精密单点金刚石切削技术概述[J]. 机械工程学报, 2013, 49(19):144-155. LI Rongbin, KONG Lingbao, ZHANG Zhihui, et al. An overview of ultra-precision diamond machining of microstructured freeform surfaces[J]. Journal of Mechanical Engineering, 2013, 49(19):144-155. (in Chinese) [7] Brinksmeier E, Ralf G, Lars S. Review on diamond-machining processes for the generation of functional surface structures[J]. CIRP Journal of Manufacturing Science and Technology, 2012, 5:1-7. [8] Sotgiu G, Schirone L. Microstructured silicon surfaces for field emission devices[J]. Applied Surface Science, 2005, 240(1-4):424-431. [9] Jiang W. Diamond turning microstructure optical components[C]//Proceeding of SPIE 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies. Bellingham, 2009, 7284:1-6. [10] 郭兵. 微结构表面的金刚石飞切加工研究[D]. 哈尔滨:哈尔滨工业大学, 2008.GUO Bing. Diamond Fly-Cutting of Microstructured Surface[D]. Harbin:Harbin Institute of Technology, 2008. (in Chinese) [11] To S, Kwok T C, Cheung C F, et al. Study of ultra-precision diamond turning of a microlens array with a fast tool servo system[C]//Proceedings of SPIE. Xi'an, 2006, 6149, S1490. [12] Kim H S, Lee K I, Lee K M, et al. Fabrication of free-form surfaces using a long-stroke fast tool servo and corrective figuring with on-machine measurement[J]. International Journal of Machine Tools & Manufacture, 2009, 49:991-997. [13] Zhang H J, Chen S J, Zhou M, et al. Fast tool servo control for diamond-cutting microstructured optical components[J]. Journal of Vacuum Science & Technology B:Microelectronics and Nanometer Structures, 2009, 27(3):1226-1229. [14] Yan J W, Maekawa K, Tamaki J, et al. Micro grooving on single-crystal germanium for infrared Fresnel lenses[J]. J Micromech Microeng, 2005, 15:1925-1931. [15] Allsop J L, Mateboer A, Shore P. Optimising efficiency in diamond turned Fresnel mould s[C]//Proceedings of SPIE. Strasbourg, 2011, 8065:806509-1-806509-11. [16] Wang Y L, Zhao Q L, Shang Y J, et al. Ultra-precision machining of Fresnel microstructure on die steel using single crystal diamond tool[J]. Journal of Materials Processing Technology, 2011, 211:2152-2159. [17] Duong Cam Vinh, 李朝将, 李勇, 等. 超精密数控机床B旋转轴的可量化对刀方法[J]. 清华大学学报:自然科学版, 2014, 54(11):1466-1470.Duong Cam Vinh, LI Chaojiang, LI Yong, et al. Tool alignment on the B axis rotary table of an ultra-precision lathe machine[J]. J Tsinghua Univ:Sci & Technol, 2014, 54(11):1466-1470. (in Chinese) [18] Li C J, Li Y, Gao X, et al. Ultra precision machining of Fresnel lens mould by single point diamond turning based on axis B rotation[J]. Int J Adv Manuf Technol, 2015, 77:907-913.

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收稿日期	出版日期
2016-06-07	2017-02-15
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2017-02-15

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