Vacuum resonant accelerometers have nonlinear sweeping frequency response, so the regular method cannot be used to measure the quality factor. A nonlinear model of the resonant beam is used here to monitor the effect of the vacuum package. The system calculates the quality factor through fitting the sweeping frequency data for the nonlinear vibrations. Tests on a resonant accelerometer verify the consistency and accuracy of the method. The measured quality factors of the accelerometers are all above 2×105. In addition, this method is also used to measure the relationship between the pressure and the quality factor, which indicates that the pressure inside the vacuum package is about 0.1 Pa. The temperature tests and long-term monitoring tests show the reliability of the vacuum packaging.
[1] Postma H W C, Kozinsky I, Husain A, et al. Dynamic range of nanotube- and nanowire-based electromechanical systems [J]. Applied Physics Letters, 2005, 86(22), 223105.
[2] Kacem N, Hentz S, Pinto D, et al. Nonlinear dynamics of nanomechanical beam resonators: Improving the performance of NEMS-based sensors [J]. Nanotechnology, 2009, 20(27): 11969-11974.
[3] Premachandran C S, Chong S C, Liw S, et al. Fabrication and testing of a wafer-level vacuum package for MEMS device [J]. IEEE Transactions on Advanced Packaging, 2009, 32(2): 486-490.
[4] Hopkins R, Miola J, Setterlund R, et al. The silicon oscillating accelerometer: A high-performance MEMS accelerometer for precision navigation and strategic guidance applications [C]//Proceedings of the 61st Annual Meeting of the Institute of Navigation. Cambridge, MA: NTM, 2005: 1043-1052.
[5] Zou X, Thiruvenkatanathan P, Seshia A A. A seismic-grade resonant MEMS accelerometer [J]. Journal of Microelectro-mechanical Systems, 2014, 23(23): 768-770.
[6] 李锡广, 李孟委, 王莉, 等. MEMS陀螺中带孔结构空气阻尼建模分析 [J]. 微纳电子技术, 2012, 49(11): 749-754.LI Xiguang, LI Mengwei, WANG Li, et al. Modeling and analysis of the air damping for perforated structures in MEMS gyroscopes [J]. MEMS and Sensors, 2012, 49(11): 749-754. (in Chinese)
[7] 陈德勇, 曹明威, 王军波, 等. 谐振式MEMS压力传感器的制作及圆片级真空封装 [J]. 光学精密工程, 2014, 22(5): 1235-1242.CHEN Deyong, CAO Mingwei, WANG Junbo, et al. Fabrication and wafer-level vacuum packaging of MEMS resonant pressure sensor [J]. Optics and Precision Engineering, 2014, 22(5): 1235-1242. (in Chinese)
[8] 石然, 裘安萍, 苏岩. 硅微谐振式加速度计的实现及性能测试 [J]. 光学精密工程, 2010, 18(12): 2583-2589. SHI Ran, QIU Anping, SU Yan. Implementation and experiments of micromechanical differential silicon resonant accelerometer [J]. Optics and Precision Engineering, 2010, 18(12): 2583-2589. (in Chinese)
[9] WANG Junbo, SHANG Yanlong, CHEN Deyong, et al. Closed-loop control of a SOI-MEMS resonant accelerometer with electromagnetic excitation [J]. Nanotechnology and Precision Engineering, 2012, 10(4): 322-326.
[10] 施芹, 苏岩, 裘安萍, 等. MEMS陀螺仪器件级真空封装技术 [J]. 光学精密工程, 2009, 17(8): 1987-1992.SHI Qin, SU Yan, QIU Anping, et al. Device level vacuum packaging technologies of MEMS gyroscope [J]. Optics and Precision Engineering, 2009, 17(8): 1987-1992. (in Chinese)
[11] 刘燕锋, 陈志勇, 张嵘, 等. 双质量微机电陀螺驱动轴结构不对称误差辨识 [J]. 清华大学学报：自然科学版, 2015, 55(3): 327-332.LIU Yanfeng, CHEN Zhiyong, ZHANG Rong, et al. Asymmetric errors identification of the drive-mode structure for dual-mass MEMS gyroscope [J]. Journal of Tsinghua University: Sci & Tech, 2015, 55(3): 327-332. (in Chinese)
[12] 严斌, 刘云峰, 董景新. 谐振式加速度计非线性振动的建模与优化[J]. 中国惯性技术学报, 2015, 23(6): 775-779.YAN Bin, LIU Yunfeng, DONG Jingxin. Modeling and optimization of resonant accelerometer's nonlinear vibration [J]. Journal of Chinese Inertial Technology, 2015, 23(6): 775-779. (in Chinese)
[13] ZHAO Shuming, LIU Yunfeng, WANG Fan, et al. Research on nonlinear vibration in micro-machined resonant accelerometer [J]. Sensors & Transducers, 2012, 15: 14-21.
[14] 梁新建, 郑旭东, 李丹东, 等. 一种基于高线性度弓形支撑梁的新型MEMS陀螺设计 [J]. 导航与控制, 2011, 10(3): 49-53.LIANG Xinjian, ZHENG Xudong, LI Dandong, et al. A novel design of MEMS gyroscope based on high linearity bow-shaped beam [J]. Navigation and Control, 2011, 10(3): 49-53. (in Chinese)
[15] Comi C, Corigliano A, Langfelder G, et al. A resonant microaccelerometer with high sensitivity operating in an oscillating circuit [J]. Journal of Microelectromechanical Systems, 2010, 19(5): 1140-1152.
[16] 王玉朝, 滕霖, 孙香政, 等. 真空封装硅微陀螺品质因数的标定 [J]. 光学精密工程, 2014, 22(10): 2708-2714.WANG Yuzhao, TENG Lin, SUN Xiangzheng, et al. Quality factor measurement of vacuum-packaged microgyroscopes [J]. Optics and Precision Engineering, 2014, 22(10): 2708-2714. (in Chinese)
