Ag离子注入对Si和SiO_2表面的辐照改性

Journal of Tsinghua University(Science and Technology) ›› 2013, Vol. 53 ›› Issue (5) : 699-703.

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Journal of Tsinghua University(Science and Technology) ›› 2013, Vol. 53 ›› Issue (5) : 699-703.

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