模拟离子刻蚀过程3维表面演化方法

Journal of Tsinghua University(Science and Technology) ›› 2014, Vol. 54 ›› Issue (10) : 1350-1355.

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Journal of Tsinghua University(Science and Technology) ›› 2014, Vol. 54 ›› Issue (10) : 1350-1355.

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