Design of phase locking system for an interference lithography scanner

WANG Leijie; ZHANG Ming; ZHU Yu; LU Sen; YANG Kaiming

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Journal of Tsinghua University(Science and Technology) ›› 2015, Vol. 55 ›› Issue (7) : 722-727.

MECHANICAL ENGINEERING

Design of phase locking system for an interference lithography scanner

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Abstract

An interference image phase locking system is built for an interference lithography scanner. This system has a feedback control system and uses the homodyne interference method for fast, accurate phase drift measurement and an acousto-optic modulator to accurately shift the phase of the interference image. Tests show that the system has ±1/25 interference image period accuracy when the system uses closed-loop control, which illustrates that this phase locking system has good locking performance. In addition, the system has a short optical path, is easy to assemble and adjust, and has a high laser utilization ratio, so the system is suitable for high-speed interference lithography scanners.

Key words

interference lithography scanner / phase locking / homodyne phase interferometer / acousto-optic modulator

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WANG Leijie, ZHANG Ming, ZHU Yu, LU Sen, YANG Kaiming. Design of phase locking system for an interference lithography scanner[J]. Journal of Tsinghua University(Science and Technology). 2015, 55(7): 722-727

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