Quantitative decoupling cooperative control of CMP multi-zone pressure systems

MEN Yanwu; ZHANG Hui; JIANG Wenxue; ZHOU Kai; YE Peiqing

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Journal of Tsinghua University(Science and Technology) ›› 2015, Vol. 55 ›› Issue (7) : 750-755.

MECHANICAL ENGINEERING

Quantitative decoupling cooperative control of CMP multi-zone pressure systems

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Abstract

Chemical mechanical polishing (CMP) has a flexible elastic diaphragm that couples the mechanical deformations of the parts and complicates the pressure control. The coupling problem is solved here using offline identification based on working point linearization + quantitative coupling analysis + quantitative decoupled cooperative control. The working point linearization gives a multi-zones model. The relative gain array (RGA) method gives the degree of coupling. The feed-forward compensation decoupling controller provides the quantitative decoupling. Simulations and experiments show that this method decouples the pressure system in the multiple zones in engineering practice, so the system has less overshoot and faster response with the same control method.

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chemical mechanical polishing (CMP) / multiple-input multiple-output (MIMO) / quantitative decoupling / relative gain array (RGA)

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MEN Yanwu, ZHANG Hui, JIANG Wenxue, ZHOU Kai, YE Peiqing. Quantitative decoupling cooperative control of CMP multi-zone pressure systems[J]. Journal of Tsinghua University(Science and Technology). 2015, 55(7): 750-755

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