The stage is the key subsystem in a lithography machine. The cable-pipe assembly transmits the motor coil signal, power and coolant in stage systems. However, disturbances generated by the cable-pipe assembly reduce the ultra-precision of the stage. Therefore, the disturbances need to be reduced to improve the stage positioning accuracy. The cable-pipe assembly and its disturbance characteristics are analyzed to develop a simplified finite element model of the cable-pipe system. Then, the main structural parameters of the assembly are optimized with design guidelines for future cable-pipe assembly designs. Tests show that the finite element model is accurate with a first order frequency error of less than 10%. Simulations show that the disturbance amplitude of the L-direction is reduced by 80% relative to that without optimization.
CHENG Rong
,
WANG Xiyuan
,
ZHU Yu
,
YANG Kaiming
. Structural optimization of the cable-pipe assembly for a lithography stage based on the finite element method[J]. Journal of Tsinghua University(Science and Technology), 2017
, 57(8)
: 798
-802
.
DOI: 10.16511/j.cnki.qhdxxb.2017.22.040
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