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Online recursive estimation of 3-DOF wafer stage decoupling time-varying parameters
HUANG Tao, YANG Kaiming, ZHU Yu, JIANG Yi, HU Chuxiong
Journal of Tsinghua University(Science and Technology) . 2016, (2): 185 -191 .  DOI: 10.16511/j.cnki.qhdxxb.2016.22.008

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