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Chemical mechanical polishing of cobalt interconnect wafers with heterogeneous structures in integrated circuits
Lifei ZHANG, Tongqing WANG, Dewen ZHAO, Xinchun LU
Journal of Tsinghua University(Science and Technology) . 2025, (2): 269 -279 .  DOI: 10.16511/j.cnki.qhdxxb.2024.21.037

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