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Analysis model of chemical mechanical polishing process based on fiber aggregates
Hansheng ZHANG, Zhenyu ZHANG, Feng ZHAO, Chunjing SHI, Zhibin YU, Shuai ZHANG
Journal of Tsinghua University(Science and Technology) . 2025, (2): 350 -363 .  DOI: 10.16511/j.cnki.qhdxxb.2025.21.003

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